Solution Can Detect Defects as Small as 300 Nanometers

Manufacturers can identify and map particle and pattern defects in the active matrix display as well as defects in the intricate circuits surrounding the active matrix.

The NanoScan automated optical inspection (AOI) technology, produced by NexTech Solutions, Inc. and FAS Holdings Group, LLC, jointly doing business as NexTechFAS, which detects defects in the manufacture of flat panel displays, is now available.

The NanoScan technology employs highly accurate and sensitive detection of problem-causing particles and pattern defects during FPD manufacture, providing submicron particle inspection for NexTechFAS AOI platforms, according to the company. Manufacturers can identify and map particle and pattern defects in the active matrix display as well as defects in the intricate circuits surrounding the active matrix. This can all be accomplished on a single platform and at resolutions as small as 300 nanometers, a level of accuracy unmatched within the display industry, according to the company.

The NanoScan will be utilized primarily within the FPD industry and will be focused on the emerging OLED technology of both glass and flexible substrates. The technology will also be used for TFT/LCDdisplays, touchscreen substrates and solar panels. It works by utilizing innovative illumination techniques in conjunction with high precision optics in order to capture submicron particles.

NexTechFAS delivers advanced metrology and automation solutions, and is the first to deliver a turn-key solution for manufacturing lines in the FPD, photovoltaic and semiconductor industries.


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